Electronics are realized through the best use of cutting-edge technology, materials and devices. They increase convenience and promote comfort. ADEKA technology is making an important contribution to such products. Utilizing synthesizing and refining technology built upon years of research, we are able to supply key materials. The future of semiconductor products begins with ADEKA.

We, ADEKA have been contributing to progress in semiconductor, flat panel display, and optical fiber field since we started to produce high purity chlorine in 1981. We also have been keeping excellent products quality based on distillation technique, analysis technique, container treatment technique, and keeping clean environment that developed through good relationship with our customers. As the results, we keep top market share about many products in following list.

The appearances of new products are expected in semiconductor field because of its road map. We, ADEKA have been developing many ALD and CVD precursors as leading company of these kinds of products. Therefore, we success to develop our original sources about High-k, ferroelectric, electrode, wiring, barrier metal, dielectric film, and Cu for semiconductor field, and then we gain customer's satisfaction. These new products are produced in specialized plant. We operate all process, from synthesis to filling, in clean room. It makes to realize prompt action for customer requirements and changing the scale from trial to mass-production.

Dielectric Film&Dopant :

New Materials : ADEKA ORCERA

PRODUCT	USE	ITEM	ELEMENT	APPEARANCE
Al(MMP)3	High-k	Al2O3	Al	Liquid
TMA				Liquid
PET		Ta2O5	Ta	Liquid
TBTEMT				Liquid
PEN		Nb2O5	Nb	Liquid
Hf(MMP)4		HfO2	Hf	Liquid
HTTB
TDMAH				Solid(m.p.32)
TEMAH				Liquid
Zr(MMP)4		ZrO2	Zr	Liquid
ZTTB
TEMAZ
Ti(MMP)4		TiO2	Ti	Liquid
TTTB
TEMAT
Dy(EDMDD)3		Rare earth	Dy	Viscous Liquid
Dy(s-BuCp)3				Liquid
La(EDMDD)3			La	Solid(m.p.150)
La(i-PrCp)3				Liquid
Pr(EDMDD)3			Pr	Solid(m.p.50)
Pr(s-BuCp)3				Liquid
Sc(EDMDD)3			Sc	Viscous Liquid
Y(s-BuCp)3			Y	Liquid
Yb(EDMDD)3			Yb	Viscous Liquid
Sr(METHD)2		STO	Sr	Viscous Liquid
Ti(MPD)(THD)2			Ti
Bi(MMP)3	Ferroelectrics	BIT	Bi	Solid(m.p.49)
Ti(MMP)4			Ti	Liquid
TiCl4	Electrode, Barrier metal	TiN	Ti	Liquid
TDMAT
TEMAT
Ru(OD)3		Ru/RuO	Ru	Viscous Liquid
Ru(EtCp)2				Liquid
Si(MMP)4	Dielectric film	SiO2	Si	Liquid
TEOS
TICS
TMS
TDMAS		SiO2/Sin
OMCTS		Low-k
TMCTS
Zn(EDMDD)2	Optical Devices	ZnO	Zn	Liquid
Zn(OD)2
ECH	High-Purity Solvent			Liquid(b.p.132)
Hexane				Liquid(b.p.69)
Octane				Liquid(b.p.126)

We offers superior MOD solution (Metal Organic Decomposition) that is stable in air atmosphere, and it is based on high purity technology that is developed by development of ALD/CVD materials. MOD solution has much stability which can't realize by conventional sol-gel method, and the materials design is able to put together in needs of a customer such as the metal ratio or the solution concentration.

We constructed a quality control and analysis building in Kashima factory in 2003 to raise a guarantee of quality function of a high purity semiconductor product. On earth highly precise analysis demanded from a semiconductor in the next generation is managed with production, and a speedup for it to a visitor is planned.

We are certified ISO 9001 and ISO 14001 in early stage.