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SEMICONDUCTOR MATERIALS

Electronics are realized through the best use of cutting-edge technology, materials and devices. They increase convenience and promote comfort. ADEKA technology is making an important contribution to such products. Utilizing synthesizing and refining technology built upon years of research, we are able to supply key materials. The future of semiconductor products begins with ADEKA.

Department: INFORMATION & ELECTRONIC MATERIALS SALES DEPARTMENT

Section: SEMICONDUCTOR MATERIALS GROUP

Etching gases

We, ADEKA have been contributing to progress in semiconductor, flat panel display, and optical fiber field since we started to produce high purity chlorine in 1981. We also have been keeping excellent products quality based on distillation technique, analysis technique, container treatment technique, and keeping clean environment that developed through good relationship with our customers. As the results, we keep top market share about many products in following list.

PRODUCT NAME USE FORMULA
ADEKA HIGH-PURITY
CHLORINE
Etching Gas Cl2
ADEKA HIGH-PURITY
HYDROGEN BROMIDE
HBr
ADEKA HIGH-PURITY
BORON TRICHLORIDE
BCl3

ALD/CVD Precursors

The appearances of new products are expected in semiconductor field because of its road map. We, ADEKA have been developing many ALD and CVD precursors as leading company of these kinds of products. Therefore, we success to develop our original sources about High-k, ferroelectric, electrode, wiring, barrier metal, dielectric film, and Cu for semiconductor field, and then we gain customer's satisfaction. These new products are produced in specialized plant. We operate all process, from synthesis to filling, in clean room. It makes to realize prompt action for customer requirements and changing the scale from trial to mass-production.

Dielectric Film&Dopant :

PRODUCT NAME USE FORMULA
ADEKA SUPER TEOS Dielectric Film Si(OC2H5)4
ADEKA HIGH-PURITY
TMB
Dopant B(OCH3)3
ADEKA HIGH-PURITY
TEB
B(OC2H5)3
ADEKA HIGH-PURITY
TMP
P(OCH3)3
ADEKA HIGH-PURITY
TMOP
PO(OCH3)3
ADEKA HIGH-PURITY
TEOP
PO(OC2H5)3

New Materials : ADEKA ORCERA

PRODUCT USE ITEM ELEMENT APPEARANCE
Al(MMP)3 High-k Al2O3 Al Liquid
TMA Liquid
PET Ta2O5 Ta Liquid
TBTEMT Liquid
PEN Nb2O5 Nb Liquid
Hf(MMP)4 HfO2 Hf Liquid
HTTB
TDMAH Solid(m.p.32#)
TEMAH Liquid
Zr(MMP)4 ZrO2 Zr Liquid
ZTTB
TEMAZ
Ti(MMP)4 TiO2 Ti Liquid
TTTB
TEMAT
Dy(EDMDD)3 Rare earth Dy Viscous Liquid
Dy(s-BuCp)3 Liquid
La(EDMDD)3 La Solid(m.p.150#)
La(i-PrCp)3 Liquid
Pr(EDMDD)3 Pr Solid(m.p.50#)
Pr(s-BuCp)3 Liquid
Sc(EDMDD)3 Sc Viscous Liquid
Y(s-BuCp)3 Y Liquid
Yb(EDMDD)3 Yb Viscous Liquid
Sr(METHD)2 STO Sr Viscous Liquid
Ti(MPD)(THD)2 Ti
Bi(MMP)3 Ferroelectrics BIT Bi Solid(m.p.49#)
Ti(MMP)4 Ti Liquid
TiCl4 Electrode,
Barrier metal
TiN Ti Liquid
TDMAT
TEMAT
Ru(OD)3 Ru/RuO Ru Viscous Liquid
Ru(EtCp)2 Liquid
Si(MMP)4 Dielectric film SiO2 Si Liquid
TEOS
TICS
TMS
TDMAS SiO2/Sin
OMCTS Low-k
TMCTS
Zn(EDMDD)2 Optical Devices ZnO Zn Liquid
Zn(OD)2
ECH High-Purity Solvent     Liquid(b.p.132#)
Hexane Liquid(b.p.69#)
Octane Liquid(b.p.126#)

MOD Precursors

We offers superior MOD solution (Metal Organic Decomposition) that is stable in air atmosphere, and it is based on high purity technology that is developed by development of ALD/CVD materials. MOD solution has much stability which can't realize by conventional sol-gel method, and the materials design is able to put together in needs of a customer such as the metal ratio or the solution concentration.

PRODUCT NAME ELEMENTS APPLICATION
ADEKA ORCERA BST-B Ba, Sr, Ti High-k material
ADEKA ORCERA PZT-B Pb, Zr, Ti FeRAM, Piezoelectric material

Image: Process

Quality Control System

Photo: A quality control and analysis building

We constructed a quality control and analysis building in Kashima factory in 2003 to raise a guarantee of quality function of a high purity semiconductor product. On earth highly precise analysis demanded from a semiconductor in the next generation is managed with production, and a speedup for it to a visitor is planned.

Image: ISO9001 and ISO14001 certification

We are certified ISO 9001 and ISO 14001 in early stage.