Participation in SEMICON Japan 2002
2002.12.4-12.6

ASAHI DENKA is going to participate in SEMICON JAPAN 2002, an exhibition for semiconductors to be held at Makuhari Messe this year, too, as follows:

Period: December 4th, Wed. through 6th, Fri., 2002
Open hours: 10.00a.m. - 5.00p.m.
Venire: Makuhari Messe
Hall No.: Hall 8
Booth No.: 8-B004
Exhibits:
<Semiconductor-related materials>
*High-K, Ferroelectric materials:
- BST <Ba(METHD)2/Sr(METHD)2/Ti(MPD)(METHD)2>
- PZT <Pb(METHD)2/Zr(METHD)2/Ti(MPD)(METHD)2>
- BLT <Bi(MMP)3/La (EDMDD)2/Ti(MPD)(METHD)2>
*Electrode materials: Ru<Ru(OD)3>
*Wiring materials: Cu<Cu(EDMDD)2>
*Gate dielectric film materials:
Hf <Hf(MMP)4>
Al <Al(MMP)3>
Si <Si (MMP)4>
Hf/Al <HA-2>
Hf/Si <SiOH-41>
Zr,La,Pr materials
*Optical device materials: SiOP-31, SiOB-41, SiOT-41, Ge, Er materials
*Exhaust gas neutralizing equipment <Adeka Clean Pas>
*CVD precursors material recovery equipment
<Fine Etching Control System>
Adeka AFES System

We are looking forward to your visits with our booth.

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