Perticipating in SEMICON Japan 2000
2000.12.6-8

We are going to participate in SEMICON Japan to be held at Makuhari Messe for the period of three days from December 6th through 8th, 2000. SEMICON JAPAN is an annual exhibition as an event with which the year for semiconductor world is rounded off.

Our exhibits are listed below, among which High Dielectric Material BST and Electrode Material Ru are particularly well received and the relevant data are available. We are looking forward to your visits with our booth.

Period: December 6th, Wed. through 8th, Fri., 2000
Opening hours: 10.00a.m. - 5.00p.m.
Venir: Makuhari Messe
Booth No.: 8-B101, in Hall 8
Exhibits:
<Semiconductor-related materials>
*High-K, Ferroelectric materials:
- BST <Ba(METHD)2/Sr(METHD)2/Ti(THD)2(MPD)>
- PZT <Pb(METHD)2/Zr(METHD)2/Ti(THD)2(MPD)>
* Electrode materials: Ru<Ru(OD)3>
* Wiring materials: Cu
* Gate dielectric film materials: Zr/Hf/Pr/La
* Exhaust gas neutralizing equipment: Adeka Clean Pas
<Fine Etching Control System>
Adeka AFES System
<UV/Heat-curable materials>
Adeka Optomer UV Initiator / Heat-curing initiator / UV/Heat-curable resin
<High-Purity Hydrogen Peroxide>
Adeka Super ELS

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